Yokohama, Japan

Chie Shishido

This inventor holds 82 USPTO granted patents and 4 published patent applications, primarily in Electron Microscopy (CPC class H01J37-28). Top assignees: Hitachi-High-Technologies Corporation, Hitachi, Ltd., Hitachi High-Technologies Corporaiton. Active years: 1998-2019.

USPTO Granted Patents = 82 

% Patents Active = 69.5

Average Co-Inventor Count = 4.8

ph-index = 15

Forward Citations = 805(Granted Patents)

Forward Citations (Not Self Cited) = 756(Dec 10, 2025)


Inventors with similar research interests:

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Location History:

  • Yokohama, JP (1998 - 2013)
  • Kawasaki, JP (2009 - 2017)
  • Tokyo, JP (2004 - 2019)

Company Filing History:


Years Active: 1998-2019

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Areas of Expertise:
Scanning Electron Microscope
Pattern Measurement
Defect Inspection
Shape Measurement
Charged Particle Beam
Film Thickness Evaluation
Tool-to-Tool Matching
Image Quality Improvement
Pattern Evaluation
Resolution Evaluation
Exposure Process Monitoring
Semiconductor Device
82 patents (USPTO):Explore Patents

Title: Innovations in Imaging: The Patents of Chie Shishido

Introduction: Chie Shishido, an accomplished inventor based in Yokohama, Japan, has made significant contributions to the field of microscopy, holding an impressive total of 82 patents. His work focuses primarily on advancements in scanning electron microscopes, which play a crucial role in materials science and nanotechnology.

Latest Patents: Among his latest innovations, Shishido has developed a cutting-edge scanning electron microscope designed to accurately determine the characteristics of step patterns on samples, irrespective of the materials involved. This microscope features a beam source and a dual detection unit: the first detecting secondary electrons emitted at a controlled angle, and the second capturing those emitted at a steeper angle. Additionally, he has created a scanning electron microscope system aimed at inspecting holes with high aspect ratios commonly found in 3D-NAND processes. By using backscattered electrons generated from the bottom of these holes, the system can measure the depth and characteristics of the holes with remarkable precision, thus enhancing imaging quality in complex materials.

Career Highlights: Chie Shishido has had an illustrious career, working with leading companies in the technology sector including Hitachi High-Technologies Corporation and Hitachi, Ltd. His expertise in the field has allowed him to contribute to innovations that have substantial impacts on electronic and materials research.

Collaborations: Throughout his career, Shishido has collaborated with notable individuals in the industry, including Maki Tanaka and Takashi Hiroi. Their joint efforts have propelled many of his ideas into successful patents, demonstrating the importance of teamwork in scientific advancements.

Conclusion: Chie Shishido's contributions to the field of electron microscopy are evident through his extensive patent portfolio. With innovations that improve the accuracy and capability of scanning electron microscopes, he has established himself as a key figure in the scientific community, continually pushing the boundaries of technology and research.

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