The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2014
Filed:
Jul. 15, 2010
Maki Tanaka, Yokohama, JP;
Norio Hasegawa, Hinode, JP;
Chie Shishido, Kawasaki, JP;
Mayuka Osaki, Yokohama, JP;
Maki Tanaka, Yokohama, JP;
Norio Hasegawa, Hinode, JP;
Chie Shishido, Kawasaki, JP;
Mayuka Osaki, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The present invention aims at proposing a library creation method and a pattern shape estimation method in which it is possible, when estimating a shape based on comparison between an actual waveform and a library, to appropriately estimate the shape. As an illustrative embodiment to achieve the object, there are proposed a method of selecting a pattern by referring to a library, a method of creating a library by use of pattern cross-sectional shapes calculated through an exposure process simulation in advance, and a method for selecting a pattern shape stored in the library.