Mayuka Osaki

Title: Mayuka Osaki: Innovator in Charged Particle Beam Technology

Introduction

Mayuka Osaki is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of charged particle beam technology, holding a total of 10 patents. Her innovative work has advanced the capabilities of various imaging and measurement systems.

Latest Patents

One of her latest patents is a charged particle beam device. This device includes a plurality of detectors for detecting a signal particle emitted from a sample irradiated with a charged particle beam. The detected signal particle is converted into an output electrical signal. Each detector is equipped with an energy discriminator that discriminates the output electrical signal according to the energy of the signal particle. Additionally, a discrimination control block sets energy discrimination conditions that differ among the energy discriminators. An image calculation block generates an image based on the discriminated electrical signal.

Another notable patent is for a scanning electron microscopy system and pattern depth measurement method. This system includes a primary electron beam radiation unit that irradiates a first pattern of a substrate with a second pattern formed in a peripheral region. A detection unit detects back scattered electrons emitted from the substrate, while an image generation unit creates an electron beam image corresponding to the strength of these electrons. A designating unit allows for the designation of a depth measurement region on the electron beam image, and a processing unit estimates the depth of the first pattern based on the obtained image signal and pattern density.

Career Highlights

Mayuka Osaki has worked with notable companies such as Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation. Her experience in these organizations has allowed her to refine her skills and contribute to groundbreaking technologies in her field.

Collaborations

Throughout her career, she has collaborated with talented individuals, including Takahiro Nishihata and Takuma Yamamoto. These collaborations have fostered innovation and have led to the development of advanced technologies.

Conclusion

Mayuka Osaki's contributions to charged particle beam technology and her impressive portfolio of patents highlight her as a leading inventor in her field. Her work continues to influence advancements in imaging and measurement systems, showcasing her dedication to innovation.