The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Oct. 06, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Takahiro Nishihata, Tokyo, JP;
Mayuka Osaki, Tokyo, JP;
Yuji Takagi, Tokyo, JP;
Takuma Yamamoto, Tokyo, JP;
Makoto Suzuki, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A charged particle beam deviceincludes: a plurality of detectorsfor detecting a signal particleemitted from a sampleirradiated with a charged particle beamand converting the detected signal particleinto an output electrical signal; an energy discriminatorprovided for each detectorand configured to discriminate the output electrical signalaccording to energy of the signal particle; a discrimination control blockfor setting an energy discrimination condition of each of the energy discriminators; and an image calculation blockfor generating an image based on the discriminated electrical signal. The discrimination control blocksets energy discrimination conditions different from each other among the plurality of energy discriminators