This inventor holds 77 USPTO granted patents and 9 published patent applications and 6 EPO patents, primarily in Charged Particle Beam Technology (CPC class H01J). Top assignees: Hitachi High-Tech Corporation, Hitachi-High-Technologies Corporation, Nkk Corporation. Active years: 1984-2026.
Inventors with similar research interests:
Location History:
- Kawasaki, JP (1992)
- Fukuyama, JP (2004 - 2007)
- Hitachinaka, JP (2007 - 2013)
- Ibaraki, JP (2014)
- Tokyo, JP (1984 - 2024)
Company Filing History:
27 out of 1,363 
17 out of 2,874 
8 out of 614 
Years Active: 1984-2026
Areas of Expertise:
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