Chi-Shen Lo is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of microelectronics, holding a total of 5 patents. His work focuses on improving manufacturing processes and measurement accuracy in microelectronic devices.

Latest Patents

Chi-Shen Lo's latest patents include a manufacturing method for microelectronic devices. This method involves performing a first inspection of a device feature during an intermediate stage of manufacture, cleaning the device feature after the first inspection, and conducting a second inspection after cleaning. Another notable patent is a linewidth measurement tool calibration method. This method employs a correction of periodic actual measurements of a topographic feature within a linewidth standard, utilizing an exponentially weighted moving average for more accurate calibration and measurement of linewidths in microelectronic products.

Career Highlights

Chi-Shen Lo is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and enhance manufacturing techniques. His expertise in microelectronics has positioned him as a valuable asset in the industry.

Collaborations

Chi-Shen has collaborated with notable coworkers such as Pey-Yuan Lee and Yi-Hung Chen, contributing to advancements in their shared field of expertise.

Conclusion

Chi-Shen Lo's innovative work in microelectronics and his impressive portfolio of patents highlight his significant impact on the industry. His contributions continue to shape the future of microelectronic manufacturing processes.

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