The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Apr. 13, 2004
Applicants:
Pey-yuan Lee, Sinshin Township, Tainan County, TW;
Feng-liang Lai, Jial Township, Tainan County, TW;
Cheng-kuo Chu, Tainan, TW;
Chi-shen Lo, Tainan, TW;
Inventors:
Pey-Yuan Lee, Sinshin Township, Tainan County, TW;
Feng-Liang Lai, Jial Township, Tainan County, TW;
Cheng-Kuo Chu, Tainan, TW;
Chi-Shen Lo, Tainan, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a microelectronic device, including performing a first inspection of a device feature during an intermediate stage of manufacture, cleaning the device feature after the first inspection, and performing a second inspection of the device feature after cleaning the device feature.