Location History:
- Tainan, TW (2004 - 2005)
- Sinshin Township, Tainan County, TW (2007)
Company Filing History:
Years Active: 2004-2007
Title: Pey-Yuan Lee: Innovator in Microelectronic Device Manufacturing
Introduction
Pey-Yuan Lee is a prominent inventor based in Sinshin Township, Tainan County, Taiwan. He has made significant contributions to the field of microelectronics, holding a total of 3 patents. His work focuses on improving manufacturing processes and measurement accuracy in microelectronic devices.
Latest Patents
One of his latest patents is a manufacturing method for microelectronic devices. This method includes performing a first inspection of a device feature during an intermediate stage of manufacture, cleaning the device feature after the first inspection, and performing a second inspection of the device feature after cleaning. Another notable patent is a linewidth measurement tool calibration method employing a linewidth standard. This method enhances the calibration of a linewidth measurement tool by correcting a series of periodic actual measurements with an exponentially weighted moving average of deviations from regressed data points. Such innovations lead to more accurate measurements of linewidths within microelectronic products.
Career Highlights
Pey-Yuan Lee is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he applies his expertise in microelectronics. His work has been instrumental in advancing the manufacturing techniques used in the industry.
Collaborations
He has collaborated with notable coworkers, including Chi-Shen Lo and Yi-Hung Chen, contributing to various projects that enhance the efficiency and accuracy of microelectronic manufacturing processes.
Conclusion
Pey-Yuan Lee's innovative contributions to microelectronics through his patents and collaborations highlight his importance in the field. His work continues to influence the manufacturing processes of microelectronic devices, ensuring advancements in technology.