The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Apr. 03, 2003
Pey-yuan Lee, Tainan, TW;
Hong-ji Yang, Kaohsiung, TW;
Yi-hung Chen, Kaohsiung, TW;
Chi-shen Lo, Tainan, TW;
Chen-ning Fuh, Taipei, TW;
Wen-chung Lee, Hsinchu, TW;
Pey-Yuan Lee, Tainan, TW;
Hong-Ji Yang, Kaohsiung, TW;
Yi-Hung Chen, Kaohsiung, TW;
Chi-Shen Lo, Tainan, TW;
Chen-Ning Fuh, Taipei, TW;
Wen-Chung Lee, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
A method for calibrating a linewidth measurement tool and a system for calibrating the linewidth measurement tool each employ a correction of a series of periodic actual measurements of at least one single measurement location of a topographic feature within a linewidth standard with an exponentially weighted moving average of a series of deviations of the series of periodic actual measurements from a corresponding series of regressed data points derived from mathematical regression of the series of periodic actual measurements. Such a correction provides for a more accurate calibration of the linewidth measurement tool and a more accurate measurement of linewidths within microelectronic products while employing the calibrated linewidth measurement tool.