Chen-Cheng Chou

Title: Chen-Cheng Chou: Innovating Semiconductor Manufacturing in Tainan, TW

Introduction

Chen-Cheng Chou is a prominent inventor based in Tainan, Taiwan, known for his contributions to the field of semiconductor manufacturing. With a remarkable portfolio encompassing seven patents, he continues to push the boundaries of innovation in this critical technology sector.

Latest Patents

Among his latest patents are advanced methods for manufacturing semiconductor structures. One notable method involves the formation of patterned masks over a semiconductor substrate, followed by etching to create semiconductor fins with trenches in between. An annealing process is then conducted using hydrogen-containing gas to smooth surfaces of these fins, leading to the selective formation of a first liner on their surfaces. This innovation ultimately enables the filling of trenches with dielectric material and the etching back of layers to create isolation structures.

Another significant patent outlines a method for etching trenches in a semiconductor substrate to form a semiconductor fin. It includes the conversion of the fin's sidewalls into hydrogen-terminated surfaces with silicon-to-hydrogen bonds. This is followed by the deposition of dielectric material, which is etched back to a suitable level, further enhancing the manufacturing process for semiconductor structures.

Career Highlights

Chen-Cheng Chou works at Taiwan Semiconductor Manufacturing Company Limited (TSMC), a world leader in semiconductor manufacturing. His extensive experience and innovative mindset have made him a key player in advancing manufacturing techniques that are crucial for the ever-evolving technology landscape.

Collaborations

In his professional journey, Chen-Cheng has collaborated with notable coworkers, including Tzong-Sheng Chang and Shiu-Ko JangJian. These partnerships demonstrate the importance of collaborative innovation in achieving breakthroughs in semiconductor technology.

Conclusion

With a strong focus on advancing semiconductor manufacturing processes, Chen-Cheng Chou’s innovative contributions are paving the way for future advancements in the industry. His work not only emphasizes the importance of collaboration among inventors but also highlights the impact of dedicated inventors in driving technological progress.