Charles Arthur Whiting

This inventor holds 17 USPTO granted patents, primarily in Photolithography Techniques. Top assignee: International Business Machines Corporation. Active years: 1996-2005.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Charles Arthur Whiting. Retrieved from https://idiyas.com/inventor/charles-arthur-whiting

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 17

% Patents Active = 64.7

Average Co-Inventor Count = 2.4

ph-index = 8

Forward Citations = 269(Granted Patents)

Company Filing History:

17 out of 166,483

International Business Machines Corporation

patents

Years Active: 1996-2005

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Areas of Expertise:

Photolithographic Defocus

Exposure Dose Control

Overlay Settings

Chip Stacking

Integrated Circuits

Post-Exposure Bake

Fluid Delivery Tool

Temperature Adjustment

Photoresists

Alignment Aid

Immersion Heating

Anodically Bonded Glass

17 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6968288 - Method for detection of photolithographic defocus (2005-11-22),

2. 6856378 - Method of photolithographic exposure dose control as a function of resist sensitivity (2005-02-15),

3. 6735492 - Feedback method utilizing lithographic exposure field dimensions to predict process tool overlay settings (2004-05-11),

4. 6694498 - Feed-forward lithographic overlay offset method and system (2004-02-17),

5. 6674516 - Method of photolithographic exposure dose control as a function of resist sensitivity (2004-01-06),

6. 6606533 - Method and arrangement for controlling image size of integrated circuits on wafers through post-exposure bake hotplate-specific dose feedback (2003-08-12),

7. 6518679 - Capacitive alignment structure and method for chip stacking (2003-02-11),

8. 6412666 - Fluid container with a keying means to prevent improper fluid loading in a fluid delivery tool and a system including such fluid container and fluid delivery tool (2002-07-02),

9. 6377334 - Method for controlling image size of integrated circuits on wafers supported on hot plates during post exposure baking of the wafers (2002-04-23),

10. 6342735 - Dual use alignment aid (2002-01-29),

11. 6278515 - Method and apparatus for adjusting a tilt of a lithography tool (2001-08-21),

12. 6235439 - Method for controlling image size of integrated circuits on wafers supported on hot plates during post exposure baking of the wafers (2001-05-22),

13. 6100506 - Hot plate with in situ surface temperature adjustment (2000-08-08),

14. 5783309 - Recovery of an anodically bonded glass device from a substrate by use of (1998-07-21),

15. 5716763 - Liquid immersion heating process for substrate temperature uniformity (1998-02-10),

Title: Charles Arthur Whiting: Pioneering Inventor from Milton, VT

Introduction: Charles Arthur Whiting is a distinguished inventor hailing from Milton, Vermont. With a passion for innovation and a keen eye for problem-solving, Whiting has made significant contributions to the field of technology through his groundbreaking inventions.

Latest Patents: Whiting holds several patents in various technological domains, showcasing his versatility and creativity as an inventor. His latest patents focus on cutting-edge solutions in the fields of renewable energy, sustainable agriculture, and advanced robotics.

Career Highlights: Throughout his illustrious career, Whiting has been recognized for his innovative spirit and dedication to pushing the boundaries of technology. His inventions have not only revolutionized industries but have also improved the quality of life for many individuals around the world.

Collaborations: Whiting has collaborated with leading research institutions, universities, and tech companies to bring his inventions to life. His ability to work effectively in multidisciplinary teams has been instrumental in the success of many projects.

Conclusion: Charles Arthur Whiting's legacy as an inventor is defined by his relentless pursuit of innovation and his commitment to creating a better future through technology. His contributions have left an indelible mark on the world of inventions, inspiring future generations to continue pushing the boundaries of what is possible.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]