Company Filing History:
Years Active: 2004-2009
Title: Innovations by ChangFeng F Xia
Introduction
ChangFeng F Xia is a prominent inventor based in Plano, TX, known for his significant contributions to the field of semiconductor technology. With a total of eight patents to his name, he has made remarkable advancements that enhance the efficiency and reliability of integrated circuits.
Latest Patents
One of his latest patents is a vapor deposition system using benzotriazole (BTA) and isopropyl alcohol for protecting copper interconnects. This innovative method involves forming an integrated circuit structure with an interconnect and depositing vaporized benzotriazole on the interconnect to provide protection. Another notable patent is for a method and apparatus for removing polymer residue from semiconductor wafer edges and back sides. This method includes securing a wafer with a modified chuck and applying a specially formulated cleaning solution to effectively remove PTFE impurities from the wafer.
Career Highlights
ChangFeng F Xia is currently employed at Texas Instruments Corporation, where he continues to push the boundaries of semiconductor technology. His work has been instrumental in developing methods that improve the manufacturing processes of semiconductor devices.
Collaborations
He has collaborated with notable colleagues, including Linlin Chen and Jiong-Ping Lu, contributing to various projects that aim to advance semiconductor technology.
Conclusion
ChangFeng F Xia's innovative patents and contributions to the semiconductor industry highlight his expertise and dedication to advancing technology. His work continues to influence the field and pave the way for future innovations.