The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Apr. 01, 2003
Applicants:
Changfeng F. Xia, Plano, TX (US);
Arunthathi Sivasothy, Plano, TX (US);
Ricky A. Jackson, Richardson, TX (US);
Asad M. Haider, Plano, TX (US);
Inventors:
ChangFeng F. Xia, Plano, TX (US);
Arunthathi Sivasothy, Plano, TX (US);
Ricky A. Jackson, Richardson, TX (US);
Asad M. Haider, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.