The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Apr. 22, 2003
Applicant:
Changfeng Xia, Plano, TX (US);
Inventor:
Changfeng Xia, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23G 1/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for cleaning a semiconductor device has the steps of securing a wafer () with a modified chuck () and applying a cleaning solution () to the backside () of the wafer (). The cleaning solution () is formulated to remove PTFE from the wafer (). The cleaning solution () is applied to the edge () of the wafer () because of the characteristics of the modified chuck () to remove PTFE impurities that gather on the edge () of the wafer ().