Company Filing History:
Years Active: 2014-2025
Title: Chang-Mao Wang: Innovator in Lithographic Technology
Introduction
Chang-Mao Wang is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of lithographic technology, holding a total of 8 patents. His innovative methods have advanced the capabilities of semiconductor manufacturing.
Latest Patents
One of his latest patents is a method of removing step height on gate structures. This method involves providing a substrate with a gate structure disposed on it. A dielectric layer covers the gate structure and substrate, followed by the formation of a composite material layer. The process includes removing part of the composite material layer to create a step height on the gate structure, which is then eliminated through wet etching. Another notable patent is for correcting critical dimension measurements of lithographic tools. This method includes providing a correction pattern on a lithographic mask and measuring critical dimensions of developed patterns to adjust exposure conditions and measuring parameters accordingly.
Career Highlights
Chang-Mao Wang is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work focuses on enhancing lithographic processes, which are crucial for the production of integrated circuits.
Collaborations
He has collaborated with notable coworkers such as Chun-Chi Yu and Hsin-Yu Hsieh, contributing to various projects that aim to improve lithographic techniques and technologies.
Conclusion
Chang-Mao Wang's innovative work in lithographic technology has made a significant impact on the semiconductor industry. His patents reflect his commitment to advancing manufacturing processes and improving measurement accuracy.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.