Company Filing History:
Years Active: 2005-2021
Title: Carlo Cornelis Maria Luijten: Innovator in Lithographic Technology
Introduction
Carlo Cornelis Maria Luijten, based in Duizel, Netherlands, is a notable inventor with a remarkable portfolio of 14 patents. His contributions primarily focus on advancements in lithographic processes, which are critical in the field of semiconductor manufacturing.
Latest Patents
Among his latest inventions is a method and apparatus for determining a fingerprint of a performance parameter during the lithographic process. This innovative approach allows for the precise control of focus during printing onto substrates. By determining a reference fingerprint associated with a reference substrate, Luijten's method ensures that substrates with product structures achieve optimal performance parameters. His detailed focus metrology patterns enhance accuracy in measuring focus performance, leveraging technologies like EUV and DUV radiation.
Career Highlights
Carlo Luijten's career is marked by his significant role at ASML Netherlands B.V., a leader in lithography technology for the semiconductor industry. His work has led to pivotal advancements that support innovation in device manufacturing and improve the overall efficiency of lithographic processes.
Collaborations
Luijten's inventive journey is further enriched by collaborations with talented colleagues, including Frank Staals and Sjoerd Nicolaas Lambertus Donders. Together, they have contributed to a culture of innovation and excellence within the company, enabling advancements that drive the semiconductor industry forward.
Conclusion
Carlo Cornelis Maria Luijten exemplifies the spirit of innovation within the lithographic technology domain. His patents not only enhance the capabilities of lithographic processes but also pave the way for future developments in semiconductor manufacturing, showcasing the vital role of inventors in technological progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.