Bi-Ming Yen

Title: Bi-Ming Yen: Innovator in Wafer Processing Technologies

Introduction

Bi-Ming Yen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in wafer processing technologies. With a total of 14 patents to his name, Yen has established himself as a key figure in the industry.

Latest Patents

Yen's latest patents include innovative processes and apparatuses that enhance wafer cleaning and processing. One of his notable inventions is the "Wet bench process with in-situ pre-treatment operation." This patent describes a wet bench processing method that incorporates an in-situ pre-treatment prior to executing the first set of wet bench operations. The pre-treatment can involve a pre-clean operation and/or a pre-heat operation, which can be performed in existing ONB tanks without the need for additional tanks. This innovation aims to reduce cross-contamination and defect issues, thereby improving the yield rate of the wet bench process.

Another significant patent is the "Wafer cleaning apparatus and method." This invention outlines an apparatus designed for wafer cleaning, featuring an enclosure made of noncombustible material, a wafer holder, a cleaning nozzle, at least one sensor, and an exhaust unit. The apparatus is engineered to hold and heat a wafer while supplying a flow of cleaning fluid onto its surface. The integrated sensors detect various attributes of the wafer, and the exhaust unit expels vapor generated by the cleaning fluid, ensuring an efficient cleaning process.

Career Highlights

Bi-Ming Yen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of wafer processing techniques.

Collaborations

Yen has collaborated with notable colleagues, including Ping-Jung Huang and Tsai-Chun Li, contributing to advancements in semiconductor technologies.

Conclusion

Bi-Ming Yen's innovative work in wafer processing technologies has led to numerous patents that enhance the efficiency of semiconductor manufacturing. His contributions continue to shape the industry and improve production processes.