Allison Yau

Title: The Innovative Contributions of Allison Yau

Introduction

Allison Yau is a prominent inventor based in Mountain View, CA (US). She has made significant contributions to the field of semiconductor processing, holding a total of 8 patents. Her work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among her latest patents, one notable invention is titled "Systems and methods of seasoning electrostatic chucks with dielectric seasoning films." This patent describes semiconductor processing systems and methods that involve flowing deposition precursors into a substrate processing region of a semiconductor processing chamber. The process includes depositing a seasoning layer on the electrostatic chuck, characterized by a dielectric constant greater than or about 3.5. Additionally, the methods involve applying a voltage to the seasoned electrostatic chuck of greater than or about 500 V, ensuring that the leakage current remains below or about 25 mA when the voltage is applied.

Another significant patent is "Helium-free silicon formation." This invention outlines exemplary deposition methods that deliver a silicon-containing precursor and an inert gas to a processing region of a semiconductor processing chamber. The methods also include providing a hydrogen-containing precursor alongside the silicon-containing precursor and the inert gas. The process culminates in forming a plasma of all precursors within the processing region, allowing for the deposition of silicon-containing material on a substrate while maintaining a helium-free environment.

Career Highlights

Allison Yau is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her innovative work has positioned her as a key figure in advancing semiconductor processing technologies.

Collaborations

Throughout her career, Allison has collaborated with notable colleagues, including Deenesh Padhi and Akhil Singhal. These collaborations have further enriched her contributions to the field.

Conclusion

Allison Yau's innovative patents and contributions to semiconductor processing exemplify her expertise and dedication to advancing technology. Her work continues to influence the industry and pave the way for future innovations.