Company Filing History:
Years Active: 2019-2025
Title: Akitsugu Ueda: Innovator in Semiconductor Technology
Introduction
Akitsugu Ueda is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His innovative approaches have advanced the methods used in heat treatment processes for silicon semiconductor wafers.
Latest Patents
Ueda's latest patents include a light irradiation type heat treatment method and a heat treatment apparatus. The heat treatment method involves transporting a silicon semiconductor wafer into a chamber where it is preheated in a nitrogen atmosphere using light from halogen lamps. Once the wafer reaches a predetermined switching temperature, oxygen gas is introduced to change the atmosphere to oxygen. This process allows for the formation of a dense, thin oxide film with fewer defects at the interface with the silicon base layer. The heat treatment apparatus features a light diffusion plate designed to prevent air from being trapped between the plate and the chamber window, ensuring efficient heat treatment.
Career Highlights
Ueda has had a successful career at Screen Holdings Co., Ltd., where he has been instrumental in developing advanced semiconductor technologies. His work has not only improved the efficiency of semiconductor manufacturing but has also contributed to the overall quality of semiconductor products.
Collaborations
Throughout his career, Ueda has collaborated with notable colleagues such as Kazuhiko Fuse and Hideaki Tanimura. These partnerships have fostered innovation and have led to the successful development of new technologies in the semiconductor industry.
Conclusion
Akitsugu Ueda's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative methods continue to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.