The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Sep. 01, 2021
Screen Holdings Co., Ltd., Kyoto, JP;
Akitsugu Ueda, Kyoto, JP;
Hiroshi Miyake, Kyoto, JP;
Kazuhiko Fuse, Kyoto, JP;
Hideaki Tanimura, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A light diffusion plate is placed on an upper surface of an upper chamber window. A blasting process is applied to a lower surface of the light diffusion plate to provide the lower surface in the form of frosted glass. When the light diffusion plate is placed on the upper surface of the upper chamber window, the light diffusion plate and the upper chamber window do not closely adhere to each other. The frosted glass releases a mass of air entering between contact surfaces of the light diffusion plate and the upper chamber window to the outside even if the mass of air thermally expands during heat treatment. This restrains the occurrence of a phenomenon in which a thin layer of air is trapped between the light diffusion plate and the upper chamber window to prevent the sliding of the light diffusion plate resulting from the air layer.