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For the Inventor, By the Inventor

Miyagi, Japan

Akitoshi Harada

USPTO Granted Patents = 10 


Average Co-Inventor Count = 1.9

ph-index = 2

Forward Citations = 13(Granted Patents)


Location History:

  • Yamanashi, JP (2006)
  • Nirasaki, JP (2006)
  • Hillsboro, OR (US) (2009)
  • Miyagi, JP (2015 - 2019)

Company Filing History:

goldMedal10 out of 10,326 
 
Tokyo Electron Limited
 patents

Years Active: 2006-2019

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10 patents (USPTO):Explore Patents
1. 10217616 - Method of controlling temperature and plasma processing apparatus (2019-02-26),
2. 10192719 - Plasma processing method (2019-01-29),
3. 10043637 - Plasma processing apparatus and particle adhesion preventing method (2018-08-07),
4. 9953862 - Plasma processing method and plasma processing apparatus (2018-04-24),
5. 9460896 - Plasma processing method and plasma processing apparatus (2016-10-04),
6. 9330891 - Plasma processing method and plasma processing apparatus (2016-05-03),
7. 9209041 - Plasma processing method and plasma processing apparatus (2015-12-08),
8. 7608544 - Etching method and storage medium (2009-10-27),
9. 7125806 - Etching method (2006-10-24),
10. 7119011 - Semiconductor device and manufacturing method thereof (2006-10-10),
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