Ajay Jain is a prominent inventor based in Austin, TX, known for his significant contributions to semiconductor technology. With a total of 10 patents to his name, Jain has made remarkable advancements in the field, particularly in methods related to semiconductor devices.

Latest Patents

One of Jain's latest patents is a method of forming a semiconductor device that involves a refractory metal nitride and a refractory metal silicon nitride layer. This process utilizes metal organic chemical deposition, specifically forming tantalum nitride (TaN) through Chemical Vapor Deposition (CVD) using Ethyltrikis (Diethylamido) Tantalum (ETDET) and ammonia (NH). By incorporating silane (SiH), tantalum silicon nitride (TaSiN) can also be formed. Notably, both layers can be created at wafer temperatures lower than approximately 400°C, with minimal carbon content within the film. This innovation allows for the formation of tantalum nitride or tantalum silicon nitride that is relatively conformal and possesses good diffusion barrier properties.

Another significant patent involves a method for protecting the edge exclusion of a semiconductor wafer from copper plating through the use of an edge exclusion masking layer. This method begins with depositing a barrier layer within an in-laid region. An edge exclusion protection layer is then formed over the barrier layer, which is processed to lie only within the edge exclusion region of the wafer. The layer is removed from active areas to ensure that the contact resistance of copper interconnects remains unaffected. Wet surface processing is employed to create a catalyst on the wafer surface, enabling electroless copper plating within active areas to form a copper seed layer. Electroplating is subsequently used to thicken the copper material, completing the in-laid copper interconnect.

Career Highlights

Ajay Jain has built a successful career at Motorola Corporation, where he has been instrumental in developing innovative semiconductor technologies. His work has not only advanced the field but has also contributed to the overall growth and success of the company.

Collaborations

Throughout his career, Jain has collaborated with notable colleagues, including Elizabeth J. Weitzman and Robert E. Jones. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Ajay Jain's contributions to semiconductor technology

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