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For the Inventor, By the Inventor

Middlefield, CT, United States of America

Zygo Corporation


USPTO Granted Patents = 377


Trademarks = 14

Forward Citations = 6,541

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111 inventors (with patents filed for the assignee):

goldMedal Peter J De Groot (120 out of 122 patents)

silverMedal Henry Allen Hill (101 out of 145 patents)

bronzeMedal Leslie Ludwig Deck (56 out of 57 patents)

4.  Xavier Colonna De Lega (52 out of 52 patents)

5.  Gary E Sommargren (21 out of 34 patents)

6.  Jan Liesener (19 out of 19 patents)

7.  Carl A Zanoni (17 out of 19 patents)

8.  Frank C Demarest (16 out of 17 patents)

9.  Andrew Eric Carlson (11 out of 12 patents)

10.  James F Biegen (9 out of 9 patents)

11.  Christopher James Evans (9 out of 9 patents)

12.  Robert J Stoner (9 out of 19 patents)

13.  Michael Schroeder (6 out of 6 patents)

14.  Mark Davidson (6 out of 13 patents)

15.  Michael Küchel (5 out of 5 patents)


Core Competencies:
Optical Metrology
Interferometric Systems
Surface Topography
Precision Positioning
Wavelength Tunable Lasers
Non-Contact Measurement
Optical Performance Optimization
Calibration Techniques
Double Pass Interferometry
Thermally Stable Sensors
Aspheric Surface Measurement
Heterodyne Encoding

377 patents:

1. 12305980 - Optical contact metrology (2025-05-20),
2. 12292274 - Interferometric lens aligner and method (2025-05-06),
3. 12104897 - Interometric optical system (2024-10-01),
4. 11966041 - Optical module (2024-04-23),
5. 11841548 - Variable-zoom imaging apparatus (2023-12-12),
6. 11605478 - Method of reducing roughness and/or defects on an optical surface and mirror formed by same (2023-03-14),
7. 11520234 - Method of mitigating defects on an optical surface and mirror formed by same (2022-12-06),
8. 11443950 - Method for figure control of optical surfaces (2022-09-13),
9. 10962348 - Method and apparatus for optimizing the optical performance of interferometers (2021-03-30),
10. 10890428 - Interferometric method and apparatus using calibration information relating a focus setting to a test object position (2021-01-12),
11. 10845251 - Wavemeter using pairs of interferometric optical cavities (2020-11-24),
12. 10591284 - Metrology of multi-layer stacks (2020-03-17),
13. 10451413 - Surface topography apparatus and method (2019-10-22),
14. 10267617 - Method and apparatus for optimizing the optical performance of interferometers (2019-04-23),
15. 10190871 - Precision positioning system using a wavelength tunable laser (2019-01-29),
Zygo Corporation is a leading global provider of optical metrology solutions, including high-precision instruments and systems for measuring surface roughness, form, and shape; thin film properties; and critical dimensions at the nanometer scale. With over 45 years of experience, Zygo serves diverse industries such as semiconductor, aerospace, automotive, medical, and more, enabling customers to achieve exceptional performance and quality in their manufacturing and research processes.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 9 2025

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377 Patents

#1 in Middlefield, CT

#30 in Connecticut

#1,181 in US

#2,370 in the World

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Middlefield, CT, United States of America

Zygo Corporation

Forward Citations = 6,541

111 inventors:

goldMedal Peter J De Groot (120 out of 122 patents)

silverMedal Henry Allen Hill (101 out of 145 patents)

bronzeMedal Leslie Ludwig Deck (56 out of 57 patents)

4.  Xavier Colonna De Lega (52 out of 52 patents)

5.  Gary E Sommargren (21 out of 34 patents)

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