The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2024
Filed:
Aug. 09, 2022
Zygo Corporation, Middlefield, CT (US);
Nicholas Mark Cirucci, Rocky Hill, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
An optical module comprising: at least three lens elements, wherein the lens elements collectively set a numerical aperture NA, a field height FH, and a system effective focal length EFLsys for directing the light rays between first and second planes, wherein NA, FH, and EFLsys satisfy 0<NA<0.25 and 0<FH<(0.4)·(EFLsys); wherein first and second adjacent lens elements having effective focal lengths EFL1 and EFL2, respectively, satisfies (1.5)·(EFLsys)<EFL1<3·(EFLsys) and (1.5)·(EFLsys)<EFL2<3·(EFLsys); wherein an air-distance between the first and second lens elements Asatisfies 0<A<EFLsys; wherein a third lens element adjacent the second lens elements opposite the first lens element and having an effective focal length EFL3 satisfies (−20)·EFLsys<EFL3<(−1)·EFLsys; and wherein an air-distance between the second and third lens elements Asatisfies 0<A<EFLsys.