The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Aug. 30, 2024
Zygo Corporation, Middlefield, CT (US);
Leslie L. Deck, Middletown, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
Disclosed is a method and corresponding apparatus for determining an absolute optical distance between two reflecting surfaces that make up an interferometric cavity, the method comprising: moving an illumination spot in a back focal plane of an interferometer along a trajectory that has a nonzero radial component relative to an optical axis to cause different radial positions for the illumination spot along the trajectory while synchronously acquiring images of interferograms of the interferometric cavity; and using one or more electronic processors to analyze the images to determine a functional dependence of an optical path difference (OPD) for the interferometric cavity versus radial position for the illumination spot and extract the absolute optical distance between the two reflecting surfaces based on the determined functional dependence.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile