The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Nov. 08, 2017
Applicant:
Zygo Corporation, Middlefield, CT (US);
Inventor:
Leslie L. Deck, Middletown, CT (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02072 (2013.04);
Abstract
A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.