The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Sep. 19, 2022
Zygo Corporation, Middlefield, CT (US);
Leslie L. Deck, Middletown, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
A method for measuring a bond gap includes receiving a light beam at a first interferometer cavity and a reference interferometer cavity, in which the first interferometer cavity is defined by a first surface and a contact interface, and the contact interface is defined by a contact gap less than 1 μm. The method includes determining a first interference amplitude of the first interferometer cavity and a second interference amplitude of the reference interferometer cavity by applying wavelength tuning and spectral analysis to measured intensities of light from the first interferometer cavity and the reference interferometer cavity. The contact gap is determined based on a ratio of the first interference amplitude and the second interference amplitude and information about a mapping between various interference amplitude ratios and expected contact gap values.