The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2022

Filed:

Feb. 25, 2020
Applicant:

Zygo Corporation, Middlefield, CT (US);

Inventor:

Andrew Nelson, Portland, CT (US);

Assignee:

Zygo Corporation, Middlefield, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); C03C 15/00 (2006.01); C03C 15/02 (2006.01); C03C 25/68 (2006.01); G02B 26/10 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/302 (2013.01); C03C 15/00 (2013.01); C03C 15/02 (2013.01); C03C 25/68 (2013.01); G02B 26/101 (2013.01); H01L 21/681 (2013.01);
Abstract

A method for figuring an optical surface of an optical element to achieve a target profile for the optical surface includes: applying a removal process to an extended region of the optical surface extending along a first direction to remove material from the extended region of the optical surface; adjusting a position of the optical surface relative to the removal process along a second direction perpendicular to the first direction to remove material from additional extended regions of the optical surface extending along the first direction at each of different positions of the optical surface along the second direction; and repeating the applying of the removal process and the adjusting of the optical surface relative to the removal process for each of multiple rotational orientations of the optical surface about a third direction perpendicular to the first and second directions to achieve the target profile of the optical surface.


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