The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2026

Filed:

May. 04, 2023
Applicant:

Zygo Corporation, Middlefield, CT (US);

Inventor:

Frank C. Demarest, Pomfret Center, CT (US);

Assignee:

Zygo Corporation, Middlefield, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02055 (2022.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02077 (2013.01); G01B 9/02068 (2013.01); G03F 7/70775 (2013.01);
Abstract

Disclosed are method and electronic components for: i) electronically extracting a sequence of values from a measurement signal corresponding to a position of a moving object, wherein the sequence of values indicates the position of the moving object at corresponding time increments; ii) electronically determining at least one of an estimate for a velocity of the moving object and an estimate for an acceleration of the moving the object based on a plurality of the values in the sequence of values; and iii) electronically correcting a value in the sequence of values to substantially reduce the effect of processing and signal delays based on one or both of the velocity and acceleration estimates.


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