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For the Inventor, By the Inventor

Grove City, OH, United States of America

Tosoh Smd, Inc.


USPTO Granted Patents = 73


Trademarks = 3

Forward Citations = 1,090

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70 inventors (with patents filed for the assignee):

goldMedal Eugene Y Ivanov (25 out of 30 patents)

silverMedal David B Smathers (15 out of 32 patents)

bronzeMedal Charles E Wickersham, Jr (8 out of 20 patents)

4.  Alexander Leybovich (7 out of 7 patents)

5.  Hao Zhang (5 out of 18 patents)

6.  Weifang Miao (5 out of 5 patents)

7.  John E Poole (5 out of 5 patents)

8.  Harry W Conard (5 out of 5 patents)

9.  Yongwen Yuan (4 out of 4 patents)

10.  Erich Theado (4 out of 5 patents)

11.  Robert S Bailey (4 out of 4 patents)

12.  Jeff Hart (3 out of 3 patents)

13.  Melvin K Holcomb (3 out of 3 patents)

14.  Lin Zhu (3 out of 3 patents)

15.  Steven L Bardus (3 out of 3 patents)


Core Competencies:
Sputtering Targets
Magnesium Oxide
Silicon Sputtering
Tantalum Sputter Targets
Aluminum Alloy Targets
High Purity Targets
Diffusion Bonding
Non-Destructive Testing
Variable Thickness Plates
Particle Emission Reduction
Ultrasonic Thickness Measurement
Surface Treatment Optimization

73 patents:

1. 12448335 - Magnesium oxide sputtering target and method of making same (2025-10-21),
2. 12387913 - Dynamic vacuum seal system for physical vapor deposition sputter applications (2025-08-12),
3. 12205804 - Silicon sputtering target with special surface treatment and good particle performance and methods of making the same (2025-01-21),
4. 11062889 - Method of production of uniform metal plates and sputtering targets made thereby (2021-07-13),
5. 10792788 - Optimized textured surfaces and methods of optimizing (2020-10-06),
6. 10655214 - Method of making a tantalum sputter target and sputter targets made thereby (2020-05-19),
7. 9831073 - Low deflection sputtering target assembly and methods of making same (2017-11-28),
8. 9566618 - Silicon sputtering target with special surface treatment and good particle performance and methods of making the same (2017-02-14),
9. 9546418 - Diffusion-bonded sputter target assembly and method of manufacturing (2017-01-17),
10. 9150957 - Method of making a sputter target and sputter targets made thereby (2015-10-06),
11. 9150956 - Monolithic aluminum alloy target and method of manufacturing (2015-10-06),
12. 8992748 - Sputtering target (2015-03-31),
13. 8556681 - Ultra smooth face sputter targets and methods of producing same (2013-10-15),
14. 8551267 - Monolithic aluminum alloy target and method of manufacturing (2013-10-08),
15. 8506882 - High purity target manufacturing methods (2013-08-13),
Tosoh SMD, Inc. is a leading manufacturer and supplier of high purity thin film materials used in the production of semiconductors. They offer a comprehensive range of products and services, including sputtering targets, evaporation materials, and thin film deposition systems. With a commitment to innovation and quality, Tosoh SMD, Inc. provides cutting-edge solutions to the semiconductor industry worldwide.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 2 2025

73 Patents

#1 in Grove City, OH

#215 in Ohio

#4,810 in US

#9,809 in the World

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Grove City, OH, United States of America

Tosoh Smd, Inc.

Forward Citations = 1,090

70 inventors:

goldMedal Eugene Y Ivanov (25 out of 30 patents)

silverMedal David B Smathers (15 out of 32 patents)

bronzeMedal Charles E Wickersham, Jr (8 out of 20 patents)

4.  Alexander Leybovich (7 out of 7 patents)

5.  Hao Zhang (5 out of 18 patents)

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