For the Inventor, By the Inventor

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Singapore, Singapore

Tech Semiconductor Singapore Pte Ltd

USPTO Granted Patents = 11

Forward Citations = 41

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22 inventors (with patents filed for the assignee):

Khoon Peng Lim (3 out of 8 patents)

Yew Hoong Phang (2 out of 3 patents)

Jian Sun (1 out of 6 patents)

4. Subramanian Krishnan (1 out of 3 patents)

5. Keen Wah Chow (1 out of 6 patents)

6. Jianguang Chang (1 out of 5 patents)

7. Kien Hoong Fong (1 out of 1 patent)

8. Wei Fu (1 out of 1 patent)

9. Jun Shi (1 out of 1 patent)

10. Ping Zhou (1 out of 1 patent)

11. Cheng Lin (1 out of 1 patent)

12. Nurulhuda Binte Jumahri (1 out of 1 patent)

13. Arvind Kumar (1 out of 1 patent)

14. Choy Yow Ng (1 out of 1 patent)

15. Ying Li Fan (1 out of 1 patent)

11 patents: Sort by Forward Citations

1. 7813893 - Method of process trend matching for identification of process variable (2010-10-12),

2. 7750819 - Real-time detection of wafer shift/slide in a chamber (2010-07-06),

3. 7680556 - Method for data collection during manufacturing processes (2010-03-16),

4. 7610111 - Method and system for wafer lot order (2009-10-27),

5. 7407871 - Method for passivation of plasma etch defects in DRAM devices (2008-08-05),

6. 7363098 - Method to identify machines causing excursion in semiconductor manufacturing (2008-04-22),

7. 7248975 - Real time monitoring of particulate contamination in a wafer processing chamber (2007-07-24),

8. 7163435 - Real time monitoring of CMP pad conditioning process (2007-01-16),

9. 7121927 - Retaining ring structure for edge control during chemical-mechanical polishing (2006-10-17),

10. 7029933 - Method for monitoring ion implant doses (2006-04-18),

11. 6893983 - Method for depositing a very high phosphorus doped silicon oxide film (2005-05-17),

Tech Semiconductor Singapore Pte Ltd is a leading provider of semiconductor solutions, offering a wide range of integrated circuit products for various industries. With state-of-the-art manufacturing facilities and a team of skilled professionals, we strive to deliver high-quality products and services to our customers worldwide.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 2 2025

11 Patents

#180 in Singapore

#181 in Singapore

#50,126 in the World

Singapore, Singapore

Tech Semiconductor Singapore Pte Ltd

Forward Citations = 41

22 inventors:

Khoon Peng Lim (3 out of 8 patents)

Yew Hoong Phang (2 out of 3 patents)

Jian Sun (1 out of 6 patents)

4. Subramanian Krishnan (1 out of 3 patents)

5. Keen Wah Chow (1 out of 6 patents)

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