Company Filing History:
2 out of 11 
1 out of 1 Years Active: 2005-2006
Title: Innovations by Yew Hoong Phang
Introduction
Yew Hoong Phang is a notable inventor based in Singapore, recognized for his contributions to the field of chemical-mechanical polishing. He holds three patents that showcase his innovative designs aimed at improving wafer processing techniques.
Latest Patents
One of his latest patents is the "Retaining ring structure for edge control during chemical-mechanical polishing." This invention presents an improved design for a retaining ring used in chemical mechanical polishing machines. The design features a plurality of straight slurry delivery grooves, angled in the direction of rotation, with alternate channels recessed to prevent contact with the polishing pad. This innovative structure allows for superior flexibility and instantaneous in-situ control of the polishing rate at the wafer's edge. For a 200 mm diameter wafer, the effective contact length of the segmented tabs is about 11.5% of the wafer perimeter, ensuring proper containment during polishing while maintaining a large area of undistorted polishing pad. By adjusting the operating pressures of the polishing head, varying polishing rates can be achieved at the edge compared to the overall wafer polishing rate. This retaining ring design offers a simpler and more cost-effective solution for enhancing wafer edge polishing rates and increasing usable wafer area.
Career Highlights
Yew Hoong Phang has worked with prominent companies such as Tech Semiconductor Singapore Pte Ltd and Tech Semiconductor Pte. Ltd. His experience in these organizations has contributed to his expertise in the semiconductor industry and the development of innovative polishing solutions.
Collaborations
Throughout his career, Yew Hoong Phang has collaborated with talented individuals, including Jianguang Chang and Jian Sun. These partnerships have likely fostered a creative environment that has led to significant advancements in their field.
Conclusion
Yew Hoong Phang's innovative contributions to chemical-mechanical polishing demonstrate his commitment to enhancing wafer processing techniques. His patents reflect a deep understanding of the challenges in the industry and provide effective solutions that benefit semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.