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San Jose, CA, United States of America

Gasonics International Corporation

USPTO Granted Patents = 11

Forward Citations = 889

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17 inventors (with patents filed for the assignee):

James W Caughran (6 out of 6 patents)

Charles A Boitnott (5 out of 6 patents)

Steve Egbert (3 out of 3 patents)

4. Terry L White (2 out of 11 patents)

5. Syed S Basha (2 out of 4 patents)

6. Shmuel Erez (1 out of 11 patents)

7. Krishnan Shrinivasan (1 out of 20 patents)

8. Karen Ann Reinhardt (1 out of 6 patents)

9. Vladimir Starov (1 out of 3 patents)

10. Robert A Shepherd, Jr (1 out of 3 patents)

11. Aleksandr Kabansky (1 out of 2 patents)

12. Sidney Hung Luu (1 out of 1 patent)

13. Daniel G Nagal (1 out of 1 patent)

14. Art Hajjarian (1 out of 1 patent)

15. Douglas MacDonald (1 out of 1 patent)

11 patents: Sort by Forward Citations

1. 6228563 - Method and apparatus for removing post-etch residues and other adherent matrices (2001-05-08),

2. 6211621 - Energy transfer microwave plasma source (2001-04-03),

3. 6190103 - Wafer transfer device and method (2001-02-20),

4. 6183026 - End effector (2001-02-06),

5. 6175095 - Resonant impedance-matching slow-wave ring structure microwave applicator for plasmas (2001-01-16),

6. 5914278 - Backside etch process chamber and method (1999-06-22),

7. 5863170 - Modular process system (1999-01-26),

8. 5855465 - Semiconductor wafer processing carousel (1999-01-05),

9. 5814154 - Short-coupled-path extender for plasma source (1998-09-29),

10. 5667592 - Process chamber sleeve with ring seals for isolating individual process (1997-09-16),

11. 5662143 - Modular gas box system (1997-09-02),

Gasonics International Corporation is a leading provider of plasma-based semiconductor manufacturing equipment. With over 30 years of experience, Gasonics is trusted by major semiconductor companies worldwide for its innovative technology and superior customer support.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

11 Patents

#469 in San Jose, CA

#6,343 in California

#26,743 in US

#50,238 in the World

San Jose, CA, United States of America

Gasonics International Corporation

Forward Citations = 889

17 inventors:

James W Caughran (6 out of 6 patents)

Charles A Boitnott (5 out of 6 patents)

Steve Egbert (3 out of 3 patents)

4. Terry L White (2 out of 11 patents)

5. Syed S Basha (2 out of 4 patents)

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