This inventor holds 11 USPTO granted patents and 6 published patent applications and 1 EPO patent. Top assignees: Planar Semiconductor, Inc., Gasonics International Corporation, Novellus Systems Incorporated. Active years: 2001-2018.
Company Filing History:
3 out of 10 
1 out of 11 
1 out of 993 
Years Active: 2001-2018
Title: Shmuel Erez: Innovator in Kinematic Mounts and Semiconductor Cleaning Technologies
Introduction
Shmuel Erez is a notable inventor based in San Jose, California, with a remarkable portfolio of 11 patents. His work primarily focuses on advancements in kinematic mounts and precision cleaning methods for semiconductor wafers. Erez's innovative contributions have significantly impacted the fields of mechanical engineering and semiconductor manufacturing.
Latest Patents
One of Erez's latest patents is for a kinematic mount that features more than three mating elements. This mount is designed to function properly by ensuring that the total degrees of freedom (DOFs) constrained by the mating elements sum to six. The design includes configurations with four mating elements, such as a pivot and three spacers, or two sliders and two spacers, which enhance stability and assembly efficiency. Another significant patent involves a method for precision cleaning and drying flat objects, specifically semiconductor wafers. This method utilizes a single-chamber cleaning and drying apparatus that cleans the wafer by impinging jets of washing liquid on both sides while it rotates. The subsequent drying process is accelerated by introducing an isopropyl-alcohol mist and gaseous nitrogen, ensuring a clean and dry surface without water traces.
Career Highlights
Throughout his career, Shmuel Erez has worked with various companies, including Planar Semiconductor, Inc. His expertise in the semiconductor industry has allowed him to develop innovative solutions that address critical challenges in wafer cleaning and handling.
Collaborations
Erez has collaborated with notable professionals in his field, including Ben H. Shelef and Rubinder S. Randhawa. These collaborations have contributed to the advancement of technologies in kinematic mounts and semiconductor processing.
Conclusion
Shmuel Erez's contributions to innovation in kinematic mounts and semiconductor cleaning technologies highlight his significant role as an inventor. His patents reflect a commitment to enhancing efficiency and precision in engineering applications.