The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Jul. 24, 2006
Rubinder S. Randhawa, Dublin, CA (US);
Shmuel Erez, San Jose, CA (US);
Harry Christov, Campbell, CA (US);
Basha Sajjad, Pleasanton, CA (US);
Rubinder S. Randhawa, Dublin, CA (US);
Shmuel Erez, San Jose, CA (US);
Harry Christov, Campbell, CA (US);
Basha Sajjad, Pleasanton, CA (US);
Planar Semiconductor, Inc., San Jose, CA (US);
Abstract
A substrate holding and rotary driving mechanism, e.g., for a cleaning chamber with vertical orientation of the wafer, that is comprised of a three-armed spider which is rotatingly installed on the outer side of the cleaning chamber and rotatingly supports on the outer ends of its arms outer shafts with eccentrically arranged inner shafts. The inner shafts pass through the outer shafts into the cleaning chamber where they support contact rollers, while the opposite ends of the inner shafts support gears driven into rotation by a synchronous belt. The contact rollers can be moved apart for insertion or removal of wafers from and into the chamber. This is achieved by turning the spider with eccentric inner shafts in one or another direction.