Daniel G Nagal

Title: The Innovations of Daniel G. Nagal: Pioneering Energy Transfer Microwave Plasma Sources

Introduction: Daniel G. Nagal is an accomplished inventor based in San Jose, California, who has made significant contributions to the field of plasma technology. With one patent to his name, he has demonstrated an innovative approach to energy transfer using microwave plasma sources. His work holds implications for various applications, particularly in semiconductor processing.

Latest Patents: Nagal's notable patent is titled "Energy Transfer Microwave Plasma Source." This invention details a sophisticated microwave energy plasma source design featuring a cylindrical structure equipped with a top lid that facilitates the supply of a process gas to a centrally located plasma tube. Key elements of this invention include push-pull air fans strategically positioned on opposite sides of the cylinder walls to generate a cooling airflow. Additionally, a microwave energy applicator, featuring a ring-type slow wave structure that envelops the plasma tube, plays a crucial role in the system's functionality. Nagal's design also incorporates a coupling mechanism connecting the cylinder and plasma tube to a process chamber where semiconductor wafers undergo processing. Furthermore, the innovative design allows for tunable microwave cavities, enhancing the efficiency and effectiveness of the plasma source by optimizing impedance matching.

Career Highlights: Daniel G. Nagal has forged a successful career at Gasonics International Corporation, where he has been instrumental in advancing microwave plasma technologies. His work has not only contributed to the development of cutting-edge products but has also solidified his reputation as a visionary inventor in the field.

Collaborations: Throughout his career, Nagal has collaborated with esteemed colleagues, including James W. Caughran and Terry L. White. Their combined expertise has led to innovative solutions and advancements within the organization, showcasing the collaborative spirit that drives success in research and invention.

Conclusion: With his inventive spirit and dedication to technological advancement, Daniel G. Nagal exemplifies the role of an innovative thinker in the modern scientific landscape. His patent for the energy transfer microwave plasma source is a testament to his commitment to pushing the boundaries of technology, particularly within semiconductor processing. As he continues his work at Gasonics International Corporation, the potential for future innovations remains promising.