Company Filing History:
Years Active: 2001
Title: The Innovative Contributions of Sidney Hung Luu in Microwave Technology
Introduction: Sidney Hung Luu is a prominent inventor based in Milpitas, California, recognized for her contributions to advanced microwave technology. With a focus on energy transfer systems, her innovative work has significant implications for semiconductor processing.
Latest Patents: Sidney Hung Luu holds a patent for an "Energy Transfer Microwave Plasma Source." This patented invention features a cylindrical structure equipped with a top lid that supports a centrally located plasma tube supplied with process gas. The design incorporates dual push-pull air fans positioned on opposite sides of the cylinder to facilitate cooling airflow within the chamber. Notably, a microwave energy applicator with a ring-type slow wave structure is integrated into the cylinder, surrounding the plasma tube. This innovative system optimally connects the cylinder and plasma tube to a process chamber where semiconductor wafers are processed. Additionally, her invention allows for adjustable top and bottom tuning plates that enhance microwave source impedance matching, thereby refining the processing capabilities of the system.
Career Highlights: Sidney has cultivated her career at Gasonics International Corporation, where she continues to push the boundaries of technology with her inventive spirit. Her dedication to refining microwave energy applications demonstrates her commitment to advancing the semiconductor industry.
Collaborations: Throughout her career, Sidney has collaborated with notable professionals, including her coworkers James W. Caughran and Terry L. White. These partnerships have fostered an environment of innovation and have contributed to the successful development of cutting-edge technologies in their field.
Conclusion: Sidney Hung Luu’s innovative work in the development of microwave plasma sources showcases her exceptional talent as an inventor. Through her patent, she has significantly impacted the processes involved in semiconductor manufacturing, illustrating the vital role that inventors like her play in shaping the future of technology.