The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2001
Filed:
Apr. 07, 1999
Lihong Cai, Fremont, CA (US);
Douglas MacDonald, Los Gatos, CA (US);
GaSonics International Corporation, San Jose, CA (US);
Abstract
An improved end effector includes an end effector body having a proximal end portion and a distal end portion. A contact member is attached to the top surface of the proximal end portion for supporting a substrate over a contact surface area. The contact member spaces the substrate from the end effector body to reduce the contact area between the end effector and the substrate. The contact member is made of a material with a low thermal conductivity. The reduced contact area and low thermal conductivity serve to decrease heat conduction between the contact member and the substrate so as to reduce a temperature gradient and thermal stresses in the substrate caused by the contact. The end effector body includes a plurality of apertures disposed between the proximal end portion and the distal end portion. At least some of the apertures overlap in position with portions of the substrate to provide open areas between blocked portions of the end effector body which overlap in position with the substrate. The open areas facilitate heat transfer by radiation for the substrate to reduce temperature gradient in the substrate caused by the overlap in position between the end effector body and the substrate.