Company Filing History:
Years Active: 1997-1999
Title: Steve Egbert: Innovator in Semiconductor Processing Technology
Introduction
Steve Egbert is a notable inventor based in Palo Alto, California. He has made significant contributions to the field of semiconductor processing, holding three patents that showcase his innovative approach to technology.
Latest Patents
One of Steve's latest patents is the Modular Process System. This invention features a modular semiconductor wafer processing system that includes detachable process reactors and generators, which can be quickly clamped to various ports on the lid of a circular wafer handling chamber. The design incorporates a multiple-spoke single-axis rigid-arm transfer carousel that is centrally located within the chamber, allowing access to different process areas. Additionally, independent cylindrical rings rise from the chamber floor to seal against the lid, isolating each process station.
Another significant patent is the Semiconductor Wafer Processing Carousel. This invention consists of an elevator chamber that accepts cassettes loaded with semiconductor wafers through a removable vacuum lock door. The elevator platform allows for the vertical movement of cassettes, while a double-axis wafer transfer arm facilitates the linear transfer of selected wafers between cassettes and various process stations within the circular wafer handling chamber. The design also features a multiple-spoke single-axis rigid-arm transfer carousel and independent cylindrical rings for effective sealing and isolation of process stations.
Career Highlights
Steve Egbert is currently employed at Gasonics International Corporation, where he continues to develop innovative solutions in semiconductor processing. His work has significantly impacted the efficiency and effectiveness of wafer processing technologies.
Collaborations
Steve has collaborated with notable coworkers, including Charles A. Boitnott and James W. Caughran, contributing to advancements in their field through teamwork and shared expertise.
Conclusion
Steve Egbert's contributions to semiconductor processing technology through his patents and work at Gasonics International Corporation highlight his role as an influential inventor. His innovative designs continue to shape the future of semiconductor manufacturing.