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Radolfzell, Germany

Brooks Automation (Germany) Gmbh

USPTO Granted Patents = 34

Forward Citations = 13

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16 inventors (with patents filed for the assignee):

Lutz Rebstock (26 out of 67 patents)

Francois Tanguy (2 out of 3 patents)

Andreas Decker (2 out of 3 patents)

4. Alexander Wendel (2 out of 2 patents)

5. David A Barker (2 out of 13 patents)

6. Matthias Fryda (1 out of 9 patents)

7. Fan Li (1 out of 2 patents)

8. Herve Guichardaz (1 out of 2 patents)

9. Thorsten Matthée (1 out of 5 patents)

10. Robert T LoBianco (1 out of 9 patents)

11. Yves Fenner (1 out of 11 patents)

12. Bhavesh Amin (1 out of 2 patents)

13. Gerald Dittrich (1 out of 1 patent)

14. Alexander Lorenz (1 out of 1 patent)

15. Tobias Forstner (1 out of 1 patent)

Core Competencies:

EUV Pod

Inspection System

Substrate Containers

Semiconductor Stocker

Humidity Control

Cleaning Systems

Automatic Handling

Tool Compiler

Wafer ID Reading

Inventory Monitoring

Gas Flow Sensor

Buffer Station

34 patents: Sort by Forward Citations

1. 12550667 - Method and system for inspection of an inner pod or an outer pod of an EUV pod (2026-02-10),

2. 12487186 - Inspection system and method of inspection for substrate containers (2025-12-02),

3. 12461453 - EUV reticle stocker and method of operating the same (2025-11-04),

4. 12288697 - Core module for semiconductor production facility machinery (2025-04-29),

5. 12148642 - Humidity control in semiconductor systems (2024-11-19),

6. 12087603 - Inspection system (2024-09-10),

7. 11978652 - Automatic handling buffer for bare stocker (2024-05-07),

8. 11872603 - Method for cleaning a synthetic surface (2024-01-16),

9. 11587816 - Container storage add-on for bare workpiece stocker (2023-02-21),

10. 11569107 - Method for inspecting a container and inspection system (2023-01-31),

11. 11515189 - Automatic handling buffer for bare stocker (2022-11-29),

12. 11372625 - Tool compiler (2022-06-28),

13. 11167322 - Cleaning systems and methods for semiconductor substrate storage articles (2021-11-09),

14. 11152203 - Semiconductor cleaner systems and methods (2021-10-19),

15. 11137735 - Method for controlling a PLC using a PC program (2021-10-05),

Company Overview

Brooks Automation (Germany) GmbH specializes in advanced automation solutions and technologies for the semiconductor and life sciences industries. The company focuses on developing innovative systems that enhance productivity and efficiency in manufacturing processes. With a strong emphasis on precision and reliability, Brooks Automation provides a range of products and services designed to meet the evolving needs of its global clientele, particularly in Europe, where it operates from its headquarters in Radolfzell.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 13 2026

34 Patents

#6 in

#1,452 in

#19,631 in the World

Radolfzell, Germany

Brooks Automation (Germany) Gmbh

Forward Citations = 13

16 inventors:

Lutz Rebstock (26 out of 67 patents)

Francois Tanguy (2 out of 3 patents)

Andreas Decker (2 out of 3 patents)

4. Alexander Wendel (2 out of 2 patents)

5. David A Barker (2 out of 13 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Brooks Automation (Germany) Gmbh. Retrieved from https://idiyas.com/company/brooks-automation-germany

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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