For the Inventor, By the Inventor

Enter assignee name

Radolfzell, Germany

Brooks Automation (germany) Gmbh

USPTO Granted Patents = 33

Forward Citations = 11

Loading Chart...

Loading Chart...

15 inventors (with patents filed for the assignee):

Lutz Rebstock (25 out of 66 patents)

Francois Tanguy (2 out of 3 patents)

Andreas Decker (2 out of 3 patents)

4. David A Barker (2 out of 13 patents)

5. Matthias Fryda (1 out of 9 patents)

6. Fan Li (1 out of 2 patents)

7. Herve Guichardaz (1 out of 2 patents)

8. Thorsten Matthée (1 out of 4 patents)

9. Robert T LoBianco (1 out of 9 patents)

10. Yves Fenner (1 out of 11 patents)

11. Bhavesh Amin (1 out of 2 patents)

12. Gerald Dittrich (1 out of 1 patent)

13. Alexander Lorenz (1 out of 1 patent)

14. Alexander Wendel (1 out of 1 patent)

15. Alexander Wendel (1 out of 1 patent)

33 patents: Sort by Forward Citations

1. 12487186 - Inspection system and method of inspection for substrate containers (2025-12-02),

2. 12461453 - EUV reticle stocker and method of operating the same (2025-11-04),

3. 12288697 - Core module for semiconductor production facility machinery (2025-04-29),

4. 12148642 - Humidity control in semiconductor systems (2024-11-19),

5. 12087603 - Inspection system (2024-09-10),

6. 11978652 - Automatic handling buffer for bare stocker (2024-05-07),

7. 11872603 - Method for cleaning a synthetic surface (2024-01-16),

8. 11587816 - Container storage add-on for bare workpiece stocker (2023-02-21),

9. 11569107 - Method for inspecting a container and inspection system (2023-01-31),

10. 11515189 - Automatic handling buffer for bare stocker (2022-11-29),

11. 11372625 - Tool compiler (2022-06-28),

12. 11167322 - Cleaning systems and methods for semiconductor substrate storage articles (2021-11-09),

13. 11152203 - Semiconductor cleaner systems and methods (2021-10-19),

14. 11137735 - Method for controlling a PLC using a PC program (2021-10-05),

15. 11107715 - Semiconductor stocker systems and methods (2021-08-31),

BROOKS AUTOMATION (GERMANY) GMBH is a leading provider of automation and engineering solutions for the semiconductor and life science industries. They design and manufacture innovative products that enable their customers to improve productivity, reduce costs, and accelerate time to market. With a strong presence in Germany, they offer a wide range of services including automation systems, robotics, and precision fluid management. Visit their website for more information.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

33 Patents

#5 in

#1,510 in

#19,529 in the World

Radolfzell, Germany

Brooks Automation (germany) Gmbh

Forward Citations = 11

15 inventors:

Lutz Rebstock (25 out of 66 patents)

Francois Tanguy (2 out of 3 patents)

Andreas Decker (2 out of 3 patents)

4. David A Barker (2 out of 13 patents)

5. Matthias Fryda (1 out of 9 patents)

Please report any incorrect information to support@idiyas.com

Loading…