The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Jun. 07, 2018
Applicant:
Brooks Automation Gmbh, Radolfzell, DE;
Inventor:
Alexander Wendel, Dürrheim— Unterbaldingen, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G06T 7/00 (2017.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G06T 7/0002 (2013.01); H01L 21/67288 (2013.01); G06T 2207/30148 (2013.01);
Abstract
The present disclosure relates to an inspection system configured and adapted for inspecting a substrate container or a component of a substrate container, the container or the component including a plurality of surfaces, the system including at least one mirror arranged and configured to provide a simultaneous view of at least a first one and a second one of the plurality of surfaces.