The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2024
Filed:
May. 24, 2017
Applicant:
Brooks Automation (Germany) Gmbh, Radolfzell, DE;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/08 (2006.01); C02F 1/461 (2023.01); C11D 7/10 (2006.01); C11D 7/50 (2006.01); C11D 11/00 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
B08B 3/08 (2013.01); C02F 1/4618 (2013.01); C11D 7/10 (2013.01); C11D 7/50 (2013.01); C11D 11/0035 (2013.01); H01L 21/67389 (2013.01); C02F 2001/46195 (2013.01); C02F 2201/46115 (2013.01);
Abstract
The invention relates to a method for cleaning a synthetic surface, in particular to remove metal dirt and/or particles therefrom, said method being characterized by the following steps: a) the synthetic surface is rinsed with deionized water; b) the synthetic surface is rinsed with electrolyzed water; and c) the synthetic surface is rinsed with deionized water.