The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Mar. 17, 2020
Applicant:
Brooks Automation (Germany) Gmbh, Radolfzell, DE;
Inventor:
Lutz Rebstock, Radolfzell, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G06T 7/00 (2017.01); H01L 21/67 (2006.01); H04N 23/56 (2023.01); H04N 23/90 (2023.01);
U.S. Cl.
CPC ...
H01L 21/67265 (2013.01); G06T 7/0004 (2013.01); H01L 21/67259 (2013.01); H01L 21/67288 (2013.01); H01L 22/12 (2013.01); H04N 23/56 (2023.01); H04N 23/90 (2023.01); G06T 2207/30148 (2013.01);
Abstract
The invention relates to an inspection system adapted for determining a state and/or content of a wafer or reticle container or at least a part of a wafer or reticle container, comprising a detection device or a multitude of detection devices () adapted to receive detection data from a surface and/or interior of the wafer or reticle container or the part of a wafer or reticle container indicative of the state and/or content of the wafer or reticle container or the part of a wafer or reticle container.