The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
Jun. 07, 2018
Applicant:
Brooks Automation (Germany) Gmbh, Radolfzell, DE;
Inventor:
Alexander Wendel, Dürrheim-Unterbaidingen, DE;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); G06T 7/40 (2017.01); G06T 7/00 (2017.01); G01N 21/88 (2006.01); G01N 21/90 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); G01N 21/8851 (2013.01); G01N 21/90 (2013.01); G06T 7/0004 (2013.01); G06T 7/40 (2013.01); H01L 21/67303 (2013.01); G01N 2201/0636 (2013.01); G06T 2207/10152 (2013.01); G06T 2207/30148 (2013.01);
Abstract
The present disclosure relates to a method for inspecting a container body adapted and configured to hold substrates, comprising the steps of directing light from a light source onto a reflector element positioned within an interior space of the container body, such that the light is reflected to illuminate at least one interior surface of the container body, wherein the light is reflected by the reflector element in a diffuse manner and generating at least one image of the at least one interior surface by means of at least one camera, and evaluating the state of the container body on the basis of the at least one image.