The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Dec. 15, 2020
Applicant:
Brooks Automation (Germany) Gmbh, Steißlingen, DE;
Inventors:
Lutz Rebstock, Gaienhofen, DE;
Yves Fenner, Berg, CH;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2005.12); H01L 21/02 (2005.12); H01L 21/677 (2005.12);
U.S. Cl.
CPC ...
H01L 21/67034 (2012.12); H01L 21/02052 (2012.12); H01L 21/67742 (2012.12);
Abstract
The invention relates to an apparatus (A,) for a semiconductor production facility handling an object, the apparatus comprising a core module () and at least one functionality module (M . . . ). A core module () as well as an operating method for such an apparatus are further aspects of the invention.