The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Oct. 05, 2016
Applicant:
Brooks Ccs Gmbh, Radolfzell, DE;
Inventor:
Lutz Rebstock, Gaienhofen, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); F26B 21/08 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); F26B 21/08 (2013.01); H01L 21/02041 (2013.01); H01L 21/67359 (2013.01); H01L 21/67389 (2013.01);
Abstract
Method for forming a clean environment for semiconductor substrates with low humidity level including the steps of measuring a humidity level in the environment using a humidity sensor to keep the environment within a predetermined interval around a humidity set point or at a humidity set point and providing a gas to the environment, until the humidity level reduces to a value within the predetermined interval around the set point or to the set point.