The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2014

Filed:

Jun. 30, 2010
Applicants:

Chen-yu Tsai, Zhongli, TW;

Shih-hui Wang, Zhonghe, TW;

Chien-ming Chiu, Hsin-Chu, TW;

Chia-ho Chen, Zhubei, TW;

Fang Wen Tsai, Hsin-Chu, TW;

Weng-jin Wu, Hsin-Chu, TW;

Jing-cheng Lin, Hsin-Chu, TW;

Wen-chih Chiou, Miaoli, TW;

Shin-puu Jeng, Hsin-Chu, TW;

Chen-hua Yu, Hsin-Chu, TW;

Inventors:

Chen-Yu Tsai, Zhongli, TW;

Shih-Hui Wang, Zhonghe, TW;

Chien-Ming Chiu, Hsin-Chu, TW;

Chia-Ho Chen, Zhubei, TW;

Fang Wen Tsai, Hsin-Chu, TW;

Weng-Jin Wu, Hsin-Chu, TW;

Jing-Cheng Lin, Hsin-Chu, TW;

Wen-Chih Chiou, Miaoli, TW;

Shin-Puu Jeng, Hsin-Chu, TW;

Chen-Hua Yu, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); H01L 29/40 (2006.01); H01L 23/48 (2006.01); H01L 23/52 (2006.01); H01L 21/76 (2006.01); H01L 21/00 (2006.01); H01L 21/4763 (2006.01); H01L 21/44 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); H01L 23/544 (2013.01); H01L 2221/68327 (2013.01); H01L 2223/54426 (2013.01); H01L 2224/13 (2013.01);
Abstract

In accordance with an embodiment, a structure comprises a substrate having a first area and a second area; a through substrate via (TSV) in the substrate penetrating the first area of the substrate; an isolation layer over the second area of the substrate, the isolation layer having a recess; and a conductive material in the recess of the isolation layer, the isolation layer being disposed between the conductive material and the substrate in the recess.


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