The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2012
Filed:
Sep. 16, 2011
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Mitsukaido, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Kenji Oka, Hitachinaka, JP;
Takanori Ninomiya, Hiratsuka, JP;
Maki Tanaka, Yokohama, JP;
Kenji Watanabe, Oume, JP;
Tetsuya Watanabe, Honjyou, JP;
Yoshio Morishige, Honjyou, JP;
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Mitsukaido, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Kenji Oka, Hitachinaka, JP;
Takanori Ninomiya, Hiratsuka, JP;
Maki Tanaka, Yokohama, JP;
Kenji Watanabe, Oume, JP;
Tetsuya Watanabe, Honjyou, JP;
Yoshio Morishige, Honjyou, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.