The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Sep. 19, 2008
Kris Bhaskar, San Jose, CA (US);
Chetana Bhaskar, San Jose, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Cecelia Campochiaro, Sunnyvale, CA (US);
Chris Maher, Campbell, CA (US);
Brian Duffy, San Jose, CA (US);
Aneesh Khullar, Sunnyvale, CA (US);
Alpa Kohli, Saratoga, CA (US);
Lalita A. Balasubramanian, Fremont, CA (US);
Santosh Bhattacharyya, San Jose, CA (US);
Mohan Mahadevan, Livermore, CA (US);
Kris Bhaskar, San Jose, CA (US);
Chetana Bhaskar, San Jose, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Cecelia Campochiaro, Sunnyvale, CA (US);
Chris Maher, Campbell, CA (US);
Brian Duffy, San Jose, CA (US);
Aneesh Khullar, Sunnyvale, CA (US);
Alpa Kohli, Saratoga, CA (US);
Lalita A. Balasubramanian, Fremont, CA (US);
Santosh Bhattacharyya, San Jose, CA (US);
Mohan Mahadevan, Livermore, CA (US);
KLA-Tencor Corp., San Jose, CA (US);
Abstract
Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.