Chetana Bhaskar

Title: Chetana Bhaskar: Innovator in Wafer Inspection Technology

Introduction

Chetana Bhaskar is a prominent inventor based in San Jose, California. She has made significant contributions to the field of wafer inspection technology, holding a total of six patents. Her innovative work focuses on improving the accuracy and efficiency of defect detection in semiconductor manufacturing.

Latest Patents

Chetana's latest patents include a "Method and system for mixed mode wafer inspection." This invention involves receiving inspection results that include images of selected regions of the wafer. The images consist of multiple wafer die, which include a set of repeating blocks and cells. The mixed-mode inspection process adjusts the pixel size of the images to accurately map each cell, block, and die to an integer number of pixels. Additionally, it compares different wafer dies, blocks, and cells to identify defects effectively.

Another notable patent is the "High sensitivity repeater defect detection." This system utilizes advanced image processing components to acquire images generated by an inspection subsystem for a wafer. It features a user interface that provides information about the wafer and reticle while allowing user interaction. The system is designed to detect defects on the wafer using a specialized algorithm that identifies repeater defects, enhancing the reliability of defect detection.

Career Highlights

Chetana has worked with notable companies in the semiconductor industry, including Kla Tencor Corporation and Kla Instruments Corporation. Her experience in these organizations has contributed to her expertise in wafer inspection technologies and defect detection systems.

Collaborations

Chetana has collaborated with several professionals in her field, including Kris Bhaskar and Ashok V. Kulkarni. These collaborations have further enriched her work and contributed to advancements in wafer inspection technology.

Conclusion

Chetana Bhaskar is a trailblazer in the field of wafer inspection, with a strong portfolio of patents that reflect her innovative spirit. Her contributions are vital to the advancement of semiconductor manufacturing processes.